Turbo pump (Hi Pace 80) | |
Speed ± 2 % | 90.000 min-1 |
Final pressure according to PNEUROP | < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar |
Membrane pump (MD 1 VARIO-SP) |
|
Max. pumping speed | 1.8 m3/h |
Speed range | 200 – 2400 min-1 |
Final vacuum (abs.) | 1 / 0.75 mbar / torr |