CCU-010 LV Low Vacuum

The CCU-010 LV low compact vacuum coating system is designed for fine vacuum applications. The modular concept allows for the subsequent conversion to a high vacuum unit.

Safematic CCU-010 coater family: The CCU-010 LV fine vacuum compact coating unit. Side open. Safematic CCU-010 coater family: The CCU-010 LV fine vacuum compact coating unit. Front. Safematic CCU-010 coater family: The CCU-010 LV fine vacuum compact coating unit. Side closed. Safematic CCU-010 coater family: The CCU-010 LV fine vacuum compact coating unit. Without head. Safematic CCU-010 coater family: The CCU-010 LV fine vacuum compact coating unit. Back. Safematic CCU-010 coater family: The CCU-010 LV fine vacuum compact coating unit. Dimensions.

Application Fine Vacuum

As base unit for our vacuum coating system the CCU-010 LV is designed for routine high quality sputter and/or carbon coatings for SEM and EDX. The modular concept allows for the subsequent conversion to a high vacuum coating system.

A Smart Device

A Sputter coater and/or carbon coater with options for plasma treatment within one device? Yes, this is possible with our table top vacuum coating system. By simply changing the process head, you can easily configure the unit for all these applications. Adjust the unit to your requirements or extend the functionality afterwards. A coating thickness monitor close to the sample is standard fitting which will precisely monitor and control film thickness of carbon and metal films.

Do Not Waste Time

The use of high-quality materials and components in combination with innovative ideas produces extraordinarily short process times. Create recipes via the modern user interface and use the automatic mode for reliable and reproducible production of thin coatings.

Low Consumption

The efficient gas control optimized for high vacuum reduces the consumption of your process gas. With a target diameter of 54 mm and high target utilization, you save money on consumables.

Compact and Practical

Save valuable laboratory space thanks to small dimensions. Weight has been minimized to reduce transport costs. Standardised small-flange quick connections („ISO-KF“) act as interfaces with your connections.

Easy Start-up and Servicing

Unpack, connect, start! Do away with high start-up costs. The plug-and-play concept allows you to start up the device yourself. You only need to connect the power supply and the process gas. The service technician can run a quick error analysis thanks to the integrated USB service interface. The modular set-up allows for the targeted replacement of defective components.

CCU-010 LV Low Vacuum Compact Coating Unit

Art. No. 100000

Safematic CCU-010 coater family:
sputter coater, carbon coater, gold coater, table top coater, mini sputter coater, vacuum coating system.
Highlights and Features
  • Reliable, solid basic unit
  • Lightweight Aluminum base, small footprint
  • Integrated vacuum measuring (Pirani, cold cathode vacuum gauge)
  • Glass process chamber ∅ 105mm (DN 100 ISO-KF compatible) with a scale indicating the working distance
  • Specimen stage, height-adjustable and tiltable (∅ 80mm) to hold your samples. The table can be easily removed without tools for cleaning purposes.
  • Speed-controlled rotary or planetary gear table with different options for holding samples (option)
  • Integrated film thickness monitor, usable in two positions (center / edge)
  • Plasma treatment option (etching)
  • Implosion guard with safety monitoring
  • Wide range power supply (90-260 VAC)
  • Process head standard interface (gas and electric)
  • Automatic process head detection
  • 5.7″ TFT touch display
  • Recipes programmable which guarantee reproducible results
  • History function with storage / view of the last processes
  • Feature for automatic venting of system in the event of power loss. This prevents the system from becoming contaminated with backing pump oil.
  • Intuitive user software with many practical features
  • Graphical representation of process data with Windows-based coating LAB software (option)
  • External alarm output
  • USB service interface for easy analysis and software upgrades
  • Various accessories, tools, cables and assembly material included in delivery
  • Flange connection (DN 25 ISO-KF) for connecting an external backing pump (LV version)
  • Power socket and cable to control the external roughing pump
  • Automatic valve control for two process gases and venting
  • 6 mm plug connections for two process gases and vent gas
  • Can be used as a pure pumping unit
  • Operating manual
Technical Data
Dimensions (L x W x H) 570 x 360 x 350 mm
Weight 22 kg
Glass cylinder Ø 120 mm (DN 100 ISO-KF compatible)
Imposion guard Plastic splinter shield around glass receptacle
Targets Ø 54 mm and thickness up to 3 mm
Coating time 0.5 ... 990 s
Coating current 10 ... 100 mA
Final vacuum < 5 · 10-3 mbar (with backing pump Pascal 2005 SD)
Vacuum measuring system Pirani measuring probe (measuring range up to 1 E-3 mbar)
Display 115 x 86 mm, TFT graphical display
Sample table Ø 80 mm, holds numerous sample plates
Height adjustment 0 ... 50 mm
Tilt 0 ... 45°
Pump system Ext. backing pump (option)
Connections, electrical Device plug C14, 90-260 VAC, 47..63 Hz, 500 W
Connections, gas Process gas: Ø 6 mm, venting gas : Ø 6 mm, plasma gas: Ø 6 mm
Connections, backing pump Mechanical: Flange connection DN 25 ISO-KF
Electrical: Connector socket C13, secured with 10 A therm. Circuit breaker.
Downloads
CCU-010 Compact Coating Unit.