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Drying System
Coating Units
CCU-010 LV Low Vacuum
CCU-010 HV High Vacuum
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Compact Coating Units
CCU-010 HV High Vacuum
Compact coating unit with integrated pumping system designed for high vacuum applications.
CCU-010 LV Low Vacuum
Compact coating unit designed for low vacuum applications.
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External Backing Pumps
Pfeiffer Pascal
Two-stage rotary vane pump for backing and medium vacuum.
Edwards nXDS10i
Dry scroll pump for backing and medium vacuum.
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Sputtering
SP-010 Sputter Head
Intelligent, compact sputter head for fine-grained sputtering.
SP-011 Sputter Head
Intelligent magnetron sputter head allowing high sputtering rates.
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Sputtertargets
Sputtertarget Gold (Au)
Purity 99.99 %
Ø 54 x 2.0 mm
Art. No. 1000127
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Sputtertarget Gold (Au)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300000
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Sputtertarget Gold (Au)
Purity 99.99 %
Ø 54 x 0.2 mm
Art. No. 300017
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Sputtertarget Gold/Palladium 80/20 (Au/Pd)
Purity 99.99 %
Ø 54 x 0.2 mm
Art. No. 300001
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Sputtertarget Gold/Palladium 70/30 (Au/Pd)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300002
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Sputtertarget Gold/Palladium 60/40 (Au/Pd)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300003
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Sputtertarget Platinum (Pt)
Purity 99.95 %
Ø 54 x 0.2 mm
Art. No. 300004
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Sputtertarget Silver 60/40 (Ag)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300005
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Sputtertarget Chromium (Cr)
Purity 99.95 %
Ø 54 x 0.5 mm
Art. No. 300006
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Sputtertarget Nickel (Ni)
Purity 99.99 %
Ø 54 x 0.35 mm
Art. No. 300007
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Sputtertarget Tungsten (W)
Purity 99.95 %
Ø 54 x 1.0 mm
Art. No. 300008
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Sputtertarget Carbon (C)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300009
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Sputtertarget Aluminium (Al)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300010
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Sputtertarget Iron (Fe)
Purity 99.95 %
Ø 54 x 0.35 mm
Art. No. 300011
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Sputtertarget Indium Tin Oxide 90/10 (ITO)
Purity 99.99 %
Ø 54 x 2.0 mm
Art. No. 300012
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Sputtertarget Copper (Cu)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300013
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Sputtertarget Titanium (Ti)
Purity 99.99 %
Ø 54 x 0.2 mm
Art. No. 300018
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Sputtertarget Titanium (Ti)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300026
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Sputtertarget Platinum/Irdium (Pt/Ir)
Purity 99.95 %
Ø 54 x 1.0 mm
Art. No. 300019
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Sputtertarget Platinum/Palladium (Pt/Pd)
Purity 99.95 %
Ø 54 x 0.5 mm
Art. No. 300021
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Sputtertarget Cobalt (Co)
Purity 99.95 %
Ø 54 x 0.35 mm
Art. No. 300022
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Sputtertarget Palladium (Pd)
Purity 99.95 %
Ø 54 x 0.3 mm
Art. No. 300023
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Sputtertarget Zinc (Zn)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 300024
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Sputtertarget Tin (Sn)
Purity 99.99 %
Ø 54 x 1.0 mm
Art. No. 1000123
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Sputtertarget Rhodium (Rh)
Purity 99.95 %
Ø 54 x 0.2 mm
Art. No. 300025
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Sputtertarget Iridium (Ir)
Purity 99.95 %
Ø 54 x 1.0 mm
Art. No. 300020
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Sputtertarget Iridium (Ir)
Purity 99.99 %
Ø 54 x 0.3 mm
Art. No. 1000129
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Thermal Evaporation
CT-010 Carbon Thread Head
Intelligent Carbon thread head for carbon evaporation.
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Carbon Thread on Coil
Carbon Thread on Coil
2 m
Art. No. 300015
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2 Carbon spools are included in base unit.
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Plasma Treatment
ET-010 Etching Unit
For specimen pre-treatment or after-treatment. Combined with a coating process it allows to apply plasma to the substrates.
GD-010 Glow Discharge
Glow discharge for surface treatment by dedicated gas plasma. Option for CT-010 carbon thread head.
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Stages & Tables
Standard Stage
Is connected to the tilt and height adjustable. Included in base unit.
ST-010 Slides Stage
Specimen stage for microscopy slides.
RS-010 Rotary Table
Rotary gear table with film thickness monitor and speed control.
PS-006 Planetary Gear Table
Planetary gear table with film thickness monitor and speed control.
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Rotary Support
PS-006 Rotary Support
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Head Storage
HS-010 Head Storage
Keep the second coating head and the full range of targets clean and ready for use.
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Options
PC Software Coating LAB
Windows software for visualisation, analysis, configuration and updates.
Transport Case
Very robust transport case with wheels and space for various accessories.
Argon 5.0
Handy, single-use Argon cylinder for mobile and quick use.
Pressure Reducer Micro
Used with single-use Argon 5.0 cylinder.
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Spare Parts
Process Chamber
Borosilicate glass 3.3
glas chamber i.d. 104 mm, height 106 mm
fire polished and flamed edges
scale bar to indicate the working distance
Art. No. 400000
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Implosion Guard
PMMA transparent
Art. No. 400001
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