SP-010 Sputter Head

The sputter head SP-010 is an intelligent, compact sputter head for fine-grained sputtering.

Safematic CCU-010 coater family: Sputter Head SP-010. Top. Safematic CCU-010 coater family: Sputter Head SP-010. Top open. Safematic CCU-010 coater family: Sputter Head SP-010. Top closed. Safematic CCU-010 coater family: Sputter Head SP-010. Top open. Safematic CCU-010 coater family: Sputter Head SP-010. Compact coating unit CC-10 with Sputter Head SP-010. Safematic CCU-010 coater family: Sputter Head SP-010. Sputter process. Safematic CCU-010 coater family: Sputter Head SP-010. Dimensions.

An Intelligent Head

Adding the final touch! Safematic sets new standards in laboratory coating with its compact sputter head. Our SP-010 sputtering system is designed for high quality sputter deposition. See for yourself the smaller form factor and the numerous features that our engineers have packed into this head. Such as efficient active cooling, which allows continuous coating times up to 50 minutes. Our sputtering modules plug into our CCU-010 HV and CCU-010 LV coating systems and are immediately ready to go.

SP-010 Sputter Head

Art. No. 100002
Used with CCU-010 LV or CCU-010 HV vacuum coating systems.
Sputter coater, gold coater, table top coater, plasma coating, sputtering, sputter deposition
Highlights and Features
  • The magnetron sputter head allows for fine-grained sputtering for high-resolution FE-SEM applications.
  • Use of targets with a diameter of 54 mm and thickness of up to 3 mm.
  • Targets can be changed easily and quickly.
  • The high target utilization saves costs.
  • Sputtering of indium tin oxide (ITO) and carbon is possible. (Prerequisite: basic device CCU-010 HV)
  • Detection and monitoring of implosion guard guarantees safe operation.
  • Automatic target shutter.
  • Electronically controlled process vacuum ensures stable pressure in the receptacle.
  • Target cooling with temperature monitoring ensures smooth operation.
  • Circular gas orifice ensures homogeneous process gas distribution.
  • Uniform electrical and pneumatic interface for use with basic units CCU-010.
  • No high voltage at electrical interfaces, because high-voltage supply is integrated into the head.
  • Automatic process head recognition.
  • Small size and weight.
Technical Data
Dimensions (L x W x H) 230 x 160 x 60 mm
Weight 2.9 kg
Targets Ø 54 mm and thickness up to 3 mm
Connections, electrical DSUB
Connections, gas DSUB
Temperature range 10 ... 40 °C
Downloads
SP-010 Sputtering module.
CCU-010 Compact Coating Unit.